关键词: 晶圆制造, 整体式布局, 自动物料搬运系统, 排队模型, 连续物料搬运

Abstract: To quickly and accurately estimate the expected Work In Process (WIP) of integral continuous Automated Material Handling System (AMHS) with united layout,a queuing-based performance analytical model was presented.By considering the layout of crossovers and the variability of steering device's service time,the suitable queuing models were used to build the mathematical model for interbay.Based on the machine buffer with finite capacity and loss lot with feedback,the M/M/1/K model with its feedback characteristic was introduced to structure the analytical model for intrabay.A 300mm wafer fabs with 24 intraday was applied to evaluate the proposed model.Compared with the results of an Arena simulation,the accuracy of proposed model on relevant performs such as WIP and equipment utilization ratio was proved.

Key words: wafer fabrications, united layout, automated material handling system, queuing model, continuous flow transporters